Thin Film Deposition
Inert Partners With Angstrom Engineering
To provide superior OLED production and research technology integrated within a glovebox atmosphere.
Since 1992, Angstrom Engineering has been a leader in the manufacture of these and similar systems.
Nebula Series
This large, configurable multi-chamber array features a central robot and automation control that allows for the creation of complex multiple substrate recipes with multiple chamber processes without breaking vacuum. The options and configurations are many with processes that are fast, reliable, and repeatable. Various automation levels are available allowing for the creation of devices with unprecedented speed and precision.
Covap PVD Platform
Covap is Angstrom’s most compact and economical PVD platform, suitable for many process applications. It’s easy to fit into your lab as well as your budget. Approximate substrate maximum: 100mm x 100mm
Nexdep PVD platform
A compact, economical, and fully featured PVD workhorse. Incredible versatility in a compact footprint. Available with a wide range of deposition source and substrate fixture options. Approximate substrate maximum: 100mm x 100mm
Amod PVD Platform
The Amod chamber size fits in between an EvoVac and a Nexdep. The Amod offers a great balance between capability and budget. Approximate substrate maximum: 150mm x 150mm
Evovac PVD Platform
Evovac is Angstrom’s most capable single-chamber PVD platform. It provides the largest chamber for multiple deposition sources, and the most modifiable process tools to ensure your specific research needs are being met precisely. Approximate substrate maximum: 150mm x 150mm